Accelerometer having an over travel stop with a stop gap less than a minimum etch size
AssigneeNXP USA, Inc.
InventorsAaron A. Geisberger, Jun Tang
Life of this patent
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Abstract
A microelectromechanical systems (MEMS) accelerometer comprises a compliant spring structure with a first beam, a second beam, and a rigid structure. One end of the first beam and one end of the second beam are coupled to the rigid structure and a proof mass is coupled to another end of the second beam. Further, a spring anchor is coupled to another end of the first beam. In response to the proof mass moving, an extension coupled to the rigid structure moves in an opposite direction to motion of the proof mass to contact the proof mass and stop the movement of the proof mass.
Claims10
A microelectromechanical systems (MEMS) accelerometer comprising:
- a compliant spring structure comprising a first beam, a second beam, and a rigid structure, wherein one end of the first beam and one end of the second beam are coupled to the rigid structure and the rigid structure is arranged in between the one end of the first beam and the one end of the second beam;
- a proof mass coupled to another end of the second beam;
- and
- a spring anchor coupled to another end of the first beam;
- wherein in response to the proof mass moving, an extension coupled to the rigid structure moves in an opposite direction to the motion of the proof mass to contact the proof mass and stop the movement of the proof mass,
- wherein the ends of the first beam and the second beam are along a longitudinal direction of the first beam and the second beam.
Dependencies are inferred from the claim text.