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US 11,768,176 B2Granted
Ion source with gas delivery for high-fidelity analysis
AssigneeMKS Instruments, Inc.
InventorJames Edward Blessing
Life of this patent
Estimating the term…
Abstract
In a system for processing gas, a gas analyzer in a gas analyzer chamber measures a quantity of ions generated from a gas. An ionization source includes an ionization chamber and an electron source for generating ions for the gas analyzer. The ionization chamber encompasses an ionization region in which particles of the gas are charged to form the ions. A channel directs the gas from a gas source into the ionization chamber, and the channel extends to a surface of the ionization chamber. An ionization source vacuum pump is in gaseous communication with the ionization chamber via a substantially large opening, and operates to draw gas from the ionization chamber.
Claims23
A system for analyzing gas, comprising:
- a gas analyzer in a gas analyzer chamber configured to measure a quantity of ions generated from a gas;
- a gas analyzer vacuum pump configured to evacuate the gas analyzer chamber;
- an ionization source comprising:
- an ionization chamber encompassing an ionization region in which particles of the gas are charged to form the ions, including 1) an aperture permitting passage of the ions between the ionization chamber and the gas analyzer chamber, 2) an opening substantially larger than the aperture and positioned away from the aperture, and 3) a perforation through the chamber, at a position between the aperture and the opening, for electrons to enter the ionization region;
- and
- an electron source configured to direct electrons into the ionization chamber via the perforation and through the gas in the ionization chamber into the ionization region to ionize the gas;
- a channel configured to direct the gas from a gas source into the ionization chamber at a location between the aperture and the ionization region and in a direction extending away from the aperture, the channel extending to a surface of the ionization chamber;
- and
- an ionization source vacuum pump in gaseous communication with the ionization chamber via the opening, the ionization source vacuum pump configured to draw gas from the ionization chamber.
6 more elements
A system for analyzing gas, comprising:
- an ionization source comprising:
- an ionization chamber encompassing an ionization region in which particles of the gas are charged to form ions, including 1) an aperture permitting passage of the ions from the ionization chamber to an evacuated gas analyzer chamber and 2) an opening substantially larger than the aperture and positioned away from the aperture, and 3) a perforation through the chamber, at a position between the aperture and the opening, for electrons to enter the ionization region;
- a channel configured to direct the gas from a gas source to the ionization chamber at a location between the aperture and the ionization region and in a direction extending away from the aperture, the channel extending through a surface of the ionization chamber, and
- an electron source configured to direct electrons into the ionization chamber via the perforation and through the gas in the ionization chamber to ionize the gas, the ionization chamber encompassing an ionization region in which particles of the gas form the ions;
- and
- an ionization source vacuum pump in gaseous communication with the ionization chamber via the opening, the ionization source vacuum pump configured to draw gas from the ionization chamber.
3 more elements
A method of analyzing gas, comprising:
- evacuating a gas analyzer chamber via a gas analyzer vacuum pump;
- directing, via a channel, gas from a gas source to an ionization chamber within the gas analyzer chamber, the channel extending to a surface of the ionization chamber;
- directing electrons through the gas in the ionization chamber to ionize the gas, the ionization chamber encompassing an ionization region in which particles of the gas are charged to form ions;
- causing passage of the ions from the ionization chamber to a gas analyzer in the gas analyzer chamber via an aperture at the ionization chamber;
- and
- drawing gas from the ionization chamber through an opening at the ionization chamber via an ionization source vacuum pump, the opening being substantially larger than the aperture and positioned away from the aperture,
- wherein the channel extends to the surface of the ionization chamber at a location between the aperture and the ionization region, and
- wherein directing the gas includes directing the gas a direction extending away from the aperture.
5 more elements
A system for analyzing gas, comprising:
- a gas analyzer in a gas analyzer chamber configured to measure a quantity of ions generated from a gas;
- a gas analyzer vacuum pump configured to evacuate the gas analyzer chamber;
- an ionization source comprising:
- an ionization chamber encompassing an ionization region in which particles of the gas are charged to form the ions, including 1) an aperture permitting passage of the ions between the ionization chamber and the gas analyzer chamber, 2) an opening substantially larger than the aperture and positioned away from the aperture, and 3) a perforation through the ionization chamber, at a position between the aperture and the opening, for electrons to enter the ionization region;
- and
- an electron source configured to direct electrons into the ionization chamber via the perforation and through the gas in the ionization chamber into the ionization region to ionize the gas;
- a channel configured to direct the gas from a gas source into the ionization chamber, the channel having a terminal segment located in the ionization chamber at a location closer to the aperture than the opening;
- and
- an ionization source vacuum pump in gaseous communication with the ionization chamber via the opening, the ionization source vacuum pump configured to draw gas from the ionization chamber.
6 more elements
Dependencies are inferred from the claim text.