Biochip having a channel
AssigneeTaiwan Semiconductor Manufacturing Company, Ltd.
InventorsYi-Shao Liu, Chun-Ren Cheng, Chun-Wen Cheng
Life of this patent
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Abstract
A biochip including a fluidic substrate having an opening extending completely through the fluidic substrate. The biochip further includes a silicon oxide coating on the fluidic substrate. The biochip further includes a plurality of sidewalls on the fluidic substrate, wherein the plurality of sidewalls defines a channel in fluid communication with the opening, the silicon oxide coating is between adjacent sidewalls of the plurality of sidewalls, and each of the plurality of sidewalls comprises polydimethylsiloxane (PDMS). The biochip further includes a detection substrate spaced from the fluidic substrate.
Claims20
A biochip comprising:
- a fluidic substrate having an opening extending completely through the fluidic substrate;
- a silicon oxide coating on the fluidic substrate;
- a plurality of sidewalls on the fluidic substrate, wherein the plurality of sidewalls defines a channel in fluid communication with the opening, the silicon oxide coating is between adjacent sidewalls of the plurality of sidewalls, and each of the plurality of sidewalls comprises polydimethylsiloxane (PDMS);
- and
- a detection substrate spaced from the fluidic substrate.
A biochip comprising:
- a fluidic substrate having an opening therein;
- a silicon oxide coating on the fluidic substrate;
- a plurality of sidewalls on the fluidic substrate, wherein the plurality of sidewalls defines a channel in fluid communication with the opening, the silicon oxide coating directly contacts the plurality of sidewalls, and each of the plurality of sidewalls comprises polydimethylsiloxane (PDMS);
- and
- a transparent substrate bonded to the plurality of sidewalls and spaced from the fluidic substrate.
A biochip comprising:
- a fluidic substrate having an opening therein;
- a silicon oxide coating on the fluidic substrate;
- a plurality of sidewalls on the fluidic substrate, wherein the plurality of sidewalls defines a plurality of channels extending in a first direction, at least one channel of the plurality of channels is in fluid communication with the opening, the silicon oxide coating directly contacts a first sidewall of the plurality of sidewalls, and each of the plurality of sidewalls comprises polydimethylsiloxane (PDMS);
- and
- a detection substrate bonded to the plurality of sidewalls and spaced from the fluidic substrate.
Dependencies are inferred from the claim text.