Vacuum valve for loading and/or unloading a vacuum chamber

A vacuum valve for loading and/or unloading of a vacuum chamber, the vacuum valve comprising:

• a closure plate that, in a closed position, is pushed against a valve seat and closes off a loading opening and, in an open position, is lifted off from the valve seat and opens up the loading opening for loading and/or unloading of the vacuum chamber;
• at least one drive configured to move the closure plate at least one of back or forth between the open position and the closed position, the drive including at least one plate holder, the closure plate is held against the at least one plate holder of the drive by at least one guide;
• and
• at least one elastic preload body, wherein the closure plate is movable relative to the plate holder along the guide counter to a preload of the elastic preload body;
• wherein the closure plate is movable by the drive along a movement path during movement of the closure plate at least one of back or forth between the open position and the closed position, and the guide is arranged parallel to the movement path of the closure plate.

A method for operating a vacuum valve for loading and/or unloading of a vacuum chamber, the vacuum valve including a closure plate that, in a closed position, is pushed against a valve seat and closes off a loading opening and, in an open position, is lifted off from the valve seat and opens up the loading opening for loading and/or unloading of the vacuum chamber;

• at least one drive configured to move the closure plate at least one of back or forth between the open position and the closed position, the drive including at least one plate holder;
• the closure plate is held against the at least one plate holder of the drive by at least one guide;
• and at least one elastic preload body, wherein the closure plate is movable relative to the plate holder along the guide counter to a preload of the elastic preload body, the method comprising:
• during movement of the closure plate in the direction toward the closed position, moving the closure plate relative to the plate holder along the guide counter to the preload of the elastic preload body if an object or a person collides with the closure plate.