Substrate fixing device, deposition processing equipment including the same, and deposition processing method using the deposition processing equipment

A deposition processing equipment comprising:

• a first chamber into which a substrate fixing device is loaded, wherein at least one substrate is loaded on the substrate fixing device and comprises:
• a first surface;
• a second surface opposite to the first surface;
• and
• a third surface that is a side surface between the first surface and the second surface;
• a second chamber defining a deposition processing space in which a deposition process is performed on the at least one substrate loaded on the substrate fixing device;
• and
• a third chamber comprising a transfer module that transfers the substrate fixing device from the first chamber to the second chamber, the substrate fixing device comprising:
• a first supporter supporting the at least one substrate;
• and
• a second supporter connected to the first supporter, making contact with the first surface and the second surface of the at least one substrate in a first direction, and vertically fixing the at least one substrate such that the third surface faces a normal line direction of the first supporter, wherein
• the second supporter defines a deposition surface in the at least one substrate and exposes the defined deposition surface to the deposition processing space, and
• the deposition surface comprises the third surface, a portion of the first surface adjacent to the third surface, and a portion of the second surface adjacent to the third surface,
• wherein the first supporter comprise:
• a base member;
• a first support member disposed on the base member defining a space into which the transfer module is inserted with the base member, and supporting the at least one substrate;
• and
• a connection member connecting the base member, the first support member, and the second supporter to each other.