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US 11,767,448 B2Granted
Polishing liquid, polishing liquid set, and polishing method
AssigneeResonac Corporation
InventorsTakaaki Matsumoto, Tomohiro Iwano, Tomoyasu Hasegawa, Tomomi Kukita
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Abstract
A polishing liquid containing: abrasive grains; a hydroxy acid; a polymer compound having at least one selected from the group consisting of a hydroxyl group and an amide group; and a liquid medium, in which a zeta potential of the abrasive grains is positive, and a weight average molecular weight of the polymer compound is 3000 or more.
Claims29
A polishing liquid comprising:
- abrasive grains;
- a hydroxy acid component comprising a hydroxy acid having one carboxyl group and one to three hydroxyl groups;
- a polymer component comprising a polymer compound having at least one selected from the group consisting of a hydroxyl group and an amide group;
- and a liquid medium, wherein
- a zeta potential of the abrasive grains is positive,
- the abrasive grains include a property of producing a liquid phase having an absorbance of more than 0 for light having a wavelength of 380 nm when an aqueous dispersion having a content of the abrasive grains adjusted to 1.0% by mass is subjected to centrifugal separation at a centrifugal acceleration of 5.8×104 G for 5 minutes, and
- a weight average molecular weight of the polymer compound is 3000 or more.
4 more elements
A polishing liquid comprising:
- abrasive grains;
- a hydroxy acid component comprising a hydroxy acid having one carboxyl group and one to three hydroxyl groups;
- a polymer component comprising a polymer compound having at least one selected from the group consisting of a hydroxyl group and an amide group;
- and a liquid medium, wherein
- the abrasive grains include composite particles and free particles not contacting the composite particles, the composite particles comprise first particles and second particles in contact with the first particles,
- the first particles contain a cerium oxide,
- the second particles comprise a hydroxide of tetravalent cerium,
- the free particles comprise a hydroxide of tetravalent cerium,
- a particle diameter of the second particles is smaller than a particle diameter of the first particles, and a particle diameter of the free particles is smaller than a particle diameter of the composite particles,
- a zeta potential of the abrasive grains is positive,
- the abrasive grains include a property of producing a liquid phase having an absorbance of more than 0 for light having a wavelength of 380 nm when an aqueous dispersion having a content of the abrasive grains adjusted to 1.0% by mass is subjected to centrifugal separation at a centrifugal acceleration of 5.8×104 G for 5 minutes, and
- a weight average molecular weight of the polymer compound is 3000 or more.
9 more elements
Dependencies are inferred from the claim text.