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US 11,767,327 B2Granted
Compound, pattern forming substrate, coupling agent, and pattern formation method
AssigneesNikon Corporation, Kanagawa University
InventorsYusuke Kawakami, Kazuo Yamaguchi
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Abstract
What is provided is a compound, a pattern forming substrate, a coupling agent, and a pattern formation method. The compound is represented by Formula (1). [in the formula, X01 represents a group exhibiting semiconductor characteristics and Y represents a divalent linking group]
Claims3
A compound represented by Formula (1),
- [in the formula, X01 represents a group exhibiting semiconductor characteristics and Y represents a divalent linking group], wherein the X01 represents a group having a thiophene skeleton.
Dependencies are inferred from the claim text.