Liquid ejecting head, liquid ejecting apparatus, and actuator

A liquid ejecting head comprising:

• a piezoelectric element;
• and
• a vibrating plate configured to vibrate in response to actuation of the piezoelectric element, the vibrating plate including
• a first layer that contains SiO2 and
• a second layer that contains ZrO2 and that is stacked on the first layer, wherein
• the second layer contains a first impurity element different from Zr,
• the concentration of the first impurity element at an interface in contact with the first layer in the second layer is higher than the concentration of the first impurity element in an internal region that is included in the second layer and that is contiguous from the interface to the surface of the second layer,
• the second layer further contains a second impurity element different from Zr and from the first impurity element,
• a difference between the concentration of the second impurity element at the interface and the concentration of the second impurity element in the internal region is smaller than a difference between the concentration of the first impurity element at the interface and the concentration of the first impurity element in the internal region, and
• the second impurity element includes Hf.

An actuator comprising:

• a piezoelectric element;
• and
• a vibrating plate configured to vibrate in response to actuation of the piezoelectric element, the vibrating plate including
• a first layer that contains SiO2 and
• a second layer that contains ZrO2 and that is stacked on the first layer, wherein
• the second layer contains a first impurity element different from Zr and
• the concentration of the first impurity element at an interface in contact with the first layer in the second layer is higher than the concentration of the first impurity element in an internal region that is included in the second layer and that is contiguous from the interface to the surface of the second layer,
• wherein the first impurity element includes a metal element, the metal element including Fe.