Calibration of an electronics processing system

A method comprising:

• placing, by a first robot arm in a first one of a factory interface or a transfer chamber, a calibration object into a load lock that separates the factory interface from the transfer chamber, wherein the calibration object is placed into the load lock such that a calibration object center is at a first target location associated with a first taught position of the first robot arm, wherein a first pocket center of a first blade of the first robot arm nominally corresponds to the first target location for the first taught position, and wherein the factory interface, the transfer chamber, and the load lock are components of an electronics processing system;
• retrieving, by a second robot arm in a second one of the factory interface or the transfer chamber, the calibration object from the load lock onto a second blade of the second robot arm using a second taught position of the second robot arm, wherein a second pocket center of the second blade nominally corresponds to the first target location for the second taught position, and wherein the calibration object center is offset from the second pocket center by a first offset amount after retrieving the calibration object;
• determining, using a laser-based sensor that is in or connected to the second one of the factory interface or the transfer chamber, the first offset amount between the calibration object center and the second pocket center;
• determining a first characteristic error value that represents a misalignment between the first taught position of the first robot arm and the second taught position of the second robot arm based on the first offset amount;
• recording the first characteristic error value in a storage medium, wherein one of the first robot arm or the second robot arm is to use the first characteristic error value to compensate for the misalignment for objects transferred between the first robot arm and the second robot arm via the load lock;
• repeating the placing of the calibration object by the first robot arm, the retrieving of the calibration object by the second robot arm, the determining of the first offset amount, and the determining of the first characteristic error value a plurality of times;
• determining a standard deviation of the first characteristic error value resulting from the repeating of the placing of the calibration object by the first robot arm, the retrieving of the calibration object by the second robot arm, the determining of the first offset amount, and the determining of the first characteristic error value the plurality of times;
• and
• determining an accuracy of a transfer sequence between the first robot arm and the second robot arm via the load lock based on the standard deviation.

A non-transitory computer readable medium comprising instructions that, when executed by a processing device, cause the processing device to perform operations comprising:

• causing a first robot arm in a factory interface to place a calibration object into a load lock that separates the factory interface from a transfer chamber, wherein the calibration object is placed into the load lock such that a calibration object center is at a first target location associated with a first taught position of the first robot arm, wherein a first pocket center of a first blade of the first robot arm nominally corresponds to the first target location for the first taught position, and wherein the factory interface, a transfer chamber, and the load lock are components of an electronics processing system;
• causing a second robot arm in the transfer chamber to retrieve the calibration object from the load lock onto a second blade of the second robot arm using a second taught position of the second robot arm, wherein a second pocket center of the second blade nominally corresponds to the first target location for the second taught position, and wherein the calibration object center is offset from the second pocket center by a first offset amount after retrieving the calibration object;
• determining, using a local center finder at an interface between the load lock and the transfer chamber, the first offset amount between the calibration object center and the second pocket center, wherein the first offset amount between the calibration object center and the second pocket center is determined while the calibration object is removed from the load lock by the second robot arm;
• determining a first characteristic error value that represents a misalignment between the first taught position of the first robot arm and the second taught position of the second robot arm based on the first offset amount;
• and
• recording the first characteristic error value in a storage medium, wherein one of the first robot arm or the second robot arm is to use the first characteristic error value to compensate for the misalignment for objects transferred between the first robot arm and the second robot arm via the load lock.