Radiation detector, radiographic imaging apparatus, and method of manufacturing radiation detector
AssigneeFUJIFILM Corporation
InventorsShinichi Ushikura, Munetaka Kato, Haruyasu Nakatsugawa
Life of this patent
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Abstract
A radiation detector includes a sensor substrate, a conversion layer, and a reinforcing substrate. In the sensor substrate, a plurality of pixels for accumulating electric charges generated in response to light converted from radiation are formed on a pixel region of a flexible base material. The conversion layer is provided on a first surface of the base material on which the pixels are provided and converts radiation into light. The reinforcing substrate is provided on a surface of the conversion layer opposite to a surface on the base material side and includes a porous layer having a plurality of through-holes to reinforce the stiffness of the base material.
Claims18
A radiation detector comprising:
- a substrate in which a plurality of pixels for accumulating electric charges generated in response to light converted from radiation are formed in a pixel region of a flexible base material;
- a conversion layer that is provided on a surface side of the base material provided with the pixels and converts the radiation into the light;
- and
- a reinforcing substrate that is provided on a surface of the conversion layer opposite to a surface on a base material side and includes a porous layer having a plurality of through-holes to reinforce a stiffness of the base material,
- wherein the porous layer has a porous structure having a porosity of 15% or more and 50% or less and a pore diameter of 0.3 μm or more and 5 mm or less.
A method of manufacturing a radiation detector, the method comprising:
- providing a flexible base material on a support body and forming a substrate in which a plurality of pixels that accumulate electric charges generated in response to light converted from radiation are provided in a pixel region of a first surface of the base material;
- providing a conversion layer that converts the radiation into the light on a surface side of the base material provided with the pixels;
- providing a reinforcing substrate including a porous layer having a plurality of through-holes on a surface of the conversion layer opposite to a surface on a base material side to reinforce a stiffness of the base material;
- and
- peeling the substrate from the support body.
Dependencies are inferred from the claim text.