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US 11,765,977 B2Granted
Tuning the piezoelectric and mechanical properties of the ALN system via alloying with YN and BN
AssigneeColorado School of Mines
InventorsSukriti Manna, Geoff Brennecka, Vladan Stevanovic, Cristian V. Ciobanu
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Abstract
Methods and materials are disclosed for simultaneously optimizing both the piezoelectric and mechanical properties of wurtzite piezoelectric materials based on the AlN wurtzite and alloyed with one or two end-members from the set BN, YN, CrN, and ScN.
Claims20
A material having a piezoelectric property and a mechanical property, comprising:
- an indium nitride wurtzite crystal structure compound;
- a first alloying element, and
- a second alloying element.
A method of fabricating a material having a piezoelectric property, comprising:
- providing a wurtzite crystal structure compound;
- alloying the wurtzite crystal with a first alloying element;
- and
- alloying the wurtzite crystal with a second alloying element, wherein the wurtzite crystal structure compound comprises indium nitride.
1 more element
Dependencies are inferred from the claim text.