Integration of modulator and laser in a single chip
AssigneeMellanox Technologies, Ltd.
InventorsVladimir Iakovlev, Yuri Berk, Paraskevas Bakopoulos, Elad Mentovich
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Abstract
An optoelectronic device includes a substrate and first thin film layers disposed on the substrate and patterned to define a vertical-cavity surface-emitting laser (VCSEL), which is configured to emit optical radiation along an optical axis perpendicular to the substrate. Second thin film layers are disposed over the first thin film layers and are patterned to define an optical modulator in which the optical radiation propagates in a direction parallel to the substrate, and an optical coupler configured to couple the optical radiation from the VCSEL into the optical modulator.
Claims18
An optoelectronic device, comprising:
- a substrate;
- first thin film layers disposed on the substrate and patterned to define a vertical-cavity surface-emitting laser (VCSEL), which is configured to emit optical radiation along an optical axis perpendicular to the substrate;
- and
- second thin film layers, disposed over the first thin film layers and patterned to define:
- an optical modulator in which the optical radiation propagates in a direction parallel to the substrate;
- and
- an optical coupler configured to couple the optical radiation from the VCSEL into the optical modulator,
- wherein the substrate and first thin film layers have lateral dimensions sufficiently large to provide a basis for the optical modulator and the optical coupler in the second thin film layers.
A method for producing an optoelectronic device, the method comprising:
- depositing and patterning first thin film layers on a substrate so as to define a vertical-cavity surface-emitting laser (VCSEL), which is configured to emit optical radiation along an optical axis perpendicular to the substrate;
- and
- depositing and patterning second thin film layers over the first thin film layers so as to define:
- an optical modulator in which the optical radiation propagates in a direction parallel to the substrate;
- and
- an optical coupler configured to couple the optical radiation from the VCSEL into the optical modulator,
- wherein the substrate and first thin film layers have lateral dimensions sufficiently large to provide a basis for the optical modulator and the optical coupler in the second thin film layers.
Dependencies are inferred from the claim text.