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US 11,763,841 B2Granted
Magnetoresistance effect element
AssigneeTDK Corporation
InventorTomoyuki Sasaki
Life of this patent
Estimating the term…
Abstract
A magnetoresistance effect element has a first ferromagnetic metal layer, a second ferromagnetic metal layer, and a tunnel barrier layer that is sandwiched between the first and second ferromagnetic metal layers, the tunnel barrier layer is expressed by a chemical formula of AB2Ox, and has a spinel structure in which cations are arranged in a disordered manner, A represents a divalent cation that is either Mg or Zn, and B represents a trivalent cation that includes a plurality of elements selected from the group consisting of Al, Ga, and In.
Claims9
A magnetoresistance effect element comprising:
- a first ferromagnetic metal layer;
- a second ferromagnetic metal layer;
- and
- a tunnel barrier layer that is sandwiched between the first and second ferromagnetic metal layers,
- wherein the tunnel barrier layer has a spinel structure,
- the tunnel barrier layer comprises a lattice-matched portion and a lattice-mismatched portion, the lattice-matched portion lattice-matching with both of the first and second ferromagnetic metal layers, the lattice-mismatched portion not lattice-machining with at least one of the first and second ferromagnetic metal layers,
- an underlayer is provided underneath the first ferromagnetic metal layer on a side opposite to the tunnel barrier layer,
- the underlayer has a NaCl crystal structure oriented in a (001) orientation, and the underlayer is made of a nitride containing at least one element selected from a group consisting of Ti, Zr, Nb, V, Hf, Ta, Mo, W, B, Al and Ce, and wherein
- when viewed as an inverse Fourier transform image in a stacking direction of a cross-section TEM image of the interface between the tunnel barrier layer and the first and/or the second ferromagnetic metal layer, a lattice-matched portion is made up of a plurality of sequential, continuously-connected lattice lines, and a lattice-mismatched portion is made up of a plurality of sequential, non-continuously-connected lattice lines and/or no lattice lines, and
- wherein the tunnel barrier layer is expressed by a chemical formula of AB2OX (0<X≤4), and has a spinel structure in which cations are arranged in a disordered manner,
- A represents a divalent cation that is either Mg or Zn, and
- B represents a trivalent cation that includes a plurality of elements selected from a group consisting of Al, Ga, and In.
9 more elements
Dependencies are inferred from the claim text.