Method and apparatus for measuring magnetic field strength
AssigneeTaiwan Semiconductor Manufacturing Company, Ltd.
InventorsBaohua Niu, Ji-Feng Ying
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Abstract
An apparatus for measuring a magnetic field strength is provided. The apparatus includes a stage on which a sample to be measured is placed, a cantilever having a tip, an optical system having a light source and a light receiver, and a microwave power source. The tip is a diamond tip having a nitrogen vacancy defect. The optical system is configured such that excitation light from the light source is focused at the diamond tip. The cantilever is configured as a coaxial microwave antenna through which microwaves from the microwave power source are supplied to the diamond tip.
Claims20
A cantilever for an apparatus for an atomic force microscope measurement and optically detected magnetic resonance measurement, the cantilever comprising:
- a cantilever body;
- a tip attached to the cantilever body;
- a conductive wire embedded in the cantilever body and coupled to the tip;
- and
- a conductive cover disposed on an outer surface of the cantilever body.
A cantilever for an apparatus for an atomic force microscope (AFM) measurement or an optically detected magnetic resonance measurement, the cantilever comprising:
- a cantilever having a tip, the tip being a diamond tip having a nitrogen vacancy defect, wherein the cantilever is configured as a coaxial microwave antenna through which microwaves from a microwave power source are supplied to the diamond tip, and
- the cantilever includes a cantilever body, a conductive wire embedded in the cantilever body and coupled to the tip, and a conductive cover disposed on an outer surface of the cantilever body, wherein the conductive cover is impedance matched with the cantilever.
A method of manufacturing a cantilever for an atomic force microscope measurement or an optically detected magnetic resonance measurement, the method comprising:
- providing a first body material;
- providing a groove for a wire, the groove being formed on the first body material;
- inserting the wire in the groove;
- bonding a second body material to the first body material to sandwich the wire inside, wherein the first body material and the second body material form a cantilever body in which the wire is embedded;
- and
- providing a diamond tip to a tip of the bonded first and second materials, wherein the wire is coupled to the diamond tip.
Dependencies are inferred from the claim text.