US 11,759,118 B2 · Magnetic sensor and inspection device

Abstract

According to one embodiment, a magnetic sensor includes a first sensor part, and a conductive member. The first sensor part includes a first magnetic element, a first side magnetic part, and a first counter side magnetic part. The conductive member includes a first corresponding portion along the first magnetic element. The first magnetic element includes a first magnetic layer, a first counter magnetic layer, a direction from the first magnetic layer toward the first counter magnetic layer being along a first direction, and a first intermediate magnetic layer located between the first magnetic layer and the first counter magnetic layer. The first side magnetic part includes a first side magnetic layer. The first counter side magnetic part includes a first counter side magnetic layer. The first intermediate magnetic layer is between the first side magnetic layer and the first counter side magnetic layer in a second direction.

Claims20

Dependent claims

A magnetic sensor, comprising:

a first sensor part including
a first magnetic element,
a first side magnetic part, and
a first counter side magnetic part;
and
a conductive member,
the conductive member including a first corresponding portion along the first magnetic element,
the first magnetic element including:
a first magnetic layer,
a first counter magnetic layer, a direction from the first magnetic layer toward the first counter magnetic layer being along a first direction, and
a first intermediate magnetic layer located between the first magnetic layer and the first counter magnetic layer,
the first side magnetic part including a first side magnetic layer,
the first counter side magnetic part including a first counter side magnetic layer,
the first intermediate magnetic layer being between the first side magnetic layer and the first counter side magnetic layer in a second direction crossing the first direction.

11 more elements

A magnetic sensor, comprising:

a first sensor part including
a first magnetic element,
a first stacked magnetic layer, and
a first counter stacked magnetic layer;
and
a conductive member,
the conductive member including a first corresponding portion along the first magnetic element,
the first magnetic element including
a first magnetic layer,
a first counter magnetic layer, a direction from the first magnetic layer toward the first counter magnetic layer being along a first direction,
a first intermediate magnetic layer located between the first magnetic layer and the first counter magnetic layer,
a first nonmagnetic layer located between the first magnetic layer and the first intermediate magnetic layer, and
a first intermediate nonmagnetic layer located between the first intermediate magnetic layer and the first counter magnetic layer,
a direction from the first stacked magnetic layer toward the first counter stacked magnetic layer being along a second direction crossing the first direction,
a portion of the first counter magnetic layer being between the first magnetic layer and the first stacked magnetic layer,
an other portion of the first counter magnetic layer being between the first magnetic layer and the first counter stacked magnetic layer.

13 more elements

Dependencies are inferred from the claim text.

Magnetic sensor and inspection device

Life of this patent

Magnetic sensor and inspection device

Life of this patent

Abstract

Claims20