Measuring deflection to determine a characteristic of a cantilever

A system for determining and comparing a first stress induced by a first process on a first target with a second stress induced by a second process on a second target, the system comprising:

• a source of directed collimated first light;
• a holder configured for adjusting an angle between the first directed light and a normal to a first target and for determining the angle;
• a mount configured for removably and replaceably holding the first target;
• a position-sensitive light detector configured for receiving the first directed light as reflected from the first target and for determining a position where the first reflected light is received;
• the system repeating the procedure with a source of collimated second light, the holder configured for adjusting an angle between the second directed light and a normal to a second target and for determining the angle, the mount configured for removably and replaceably holding the second target, the position sensitive detector configured for receiving the second directed light as reflected from the second target and for determining a position where the second reflected light is received;
• and
• a computing device configured for:
• based, at least in part, on the angle determined from the first target and the angle determined from the second target, the first determined position from the first target and the second determined position from the second target, calculating a deflection induced into the first processed target;
• and based, at least in part, on the calculated induced deflection, calculating a stress induced by the first process into the first processed target by comparison with a pre-first process baseline for the first target, and having repeated said steps with a second target and a second process, the second process distinct from the first process;
• comparing the calculated stress induced by the first process into the first processed target with the calculated stress induced by the second process into the second processed target, also having a pre-second process baseline for the second target;
• and based, at least in part, on the comparison of the calculated induced stresses, preparing a recommendation of one of the first and second processes.