Resonating sensor for high-pressure and high-temperature environments
AssigneeSchlumberger Technology Corporation
InventorsDidier Pohl, Florian Risser, Jacques Sellin, Patrice Ligneul, Kamran Danaie, Mihir Patel, Boris Valkov
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Abstract
Resonating sensors for use in high-pressure and high-temperature environments are provided. In one embodiment, an apparatus includes a sensor with a double-ended tuning fork piezoelectric resonator that includes a first tine and a second tine. These tines are spaced apart from one another so as to form a slot between the first and second tines. The width of the slot from the first tine to the second tine varies along the lengths of the first and second tines. Various other resonators, devices, systems, and methods are also disclosed.
Claims16
An apparatus comprising:
- a sensor including a sensing element having a double-ended tuning fork piezoelectric resonator including a first tine and a second tine spaced apart from one another so as to form a slot between the first and second tines, wherein a width of the slot from the first tine to the second tine, the width of the slot measured orthogonally to a length of the first tine and a length of the second tine, varies along the lengths of the first and second tines,
- wherein the sensor comprises a body comprising the sensing element and caps coupled to the sensing element so as to enclose the double-ended tuning fork piezoelectric resonator within a cavity inside the body, wherein the sensing element and the caps are hermetically sealed,
- wherein the double-ended tuning fork piezoelectric resonator is formed in a substrate with the first and second tines positioned within an aperture of the substrate with the slot between the first and second tines, wherein the substrate includes an additional resonator, and
- wherein the additional resonator includes:
- a beam in the substrate, the beam located between the aperture and an additional slot in the substrate spaced from the aperture;
- and two electrodes on the beam to enable excitation of an acoustic standing wave in the beam.
An apparatus comprising:
- a sensing element having:
- a first piezoelectric resonator formed in a crystal substrate, the first piezoelectric resonator including a double-ended tuning fork within an aperture of the crystal substrate;
- and
- a second piezoelectric resonator formed in the crystal substrate, wherein the second piezoelectric resonator includes:
- a beam in the crystal substrate defined by the aperture and a slot spaced apart from the aperture, a first electrode positioned on one side of the beam along the slot, and a second electrode positioned on another side of the beam along the aperture, wherein the first and second electrodes facilitate excitation of a standing wave in the second piezoelectric resonator.
A method comprising:
- measuring pressure of a fluid using a double-ended tuning fork resonator of a sensor, the double-ended tuning fork resonator having non-parallel tines, wherein the tines are formed of a piezoelectric crystal material, the piezoelectric crystal material comprising a Langasite crystal or a Langatate crystal;
- measuring temperature of the fluid with the sensor, wherein the measuring the temperature of the fluid with the sensor includes estimating resistivity of an excitation electrode of the double-ended tuning fork resonator;
- and
- using the measured temperature to perform temperature compensation on the measured pressure.
Dependencies are inferred from the claim text.