Photocurable composition
AssigneeCanon Kabushiki Kaisha
InventorsFen Wan, Weijun Liu
Life of this patent
Estimating the term…
Abstract
In one embodiment, a photocurable composition can comprise a polymerizable material and a photoinitiator, wherein the polymerizable material includes an isocyanate group containing compound of formula (1): R1-R2-N═C═O (1), with R1 including a carbon-carbon double bond, and R2 being substituted or unsubstituted alkyl, aryl, or alkylaryl. An amount of 1 wt % to 10 wt % of the isocyanate group containing compound can cause a strong adhesion strength of the photocurable composition to a silicon substrate after curing, and may allow the omission of an adhesion layer between substrate and the photo-cured layer.
Claims19
A photocurable composition comprising a polymerizable material and a photoinitiator, wherein
- the polymerizable material comprises at least one first monomer and at least one second monomer, the at least one first monomer including an isocyanate group containing compound of formula (1):
- R1-R2—N═C═O (1), with R1 including a carbon-carbon double bond, and R2 being substituted or unsubstituted alkyl, aryl, or alkylaryl;
- an amount of the isocyanate group containing compound is between 1 wt % and 10 wt % based on the total weight of the photocurable composition;
- and
- a viscosity of the photocurable composition is not greater than 30 mPa s.
A method of forming a photo-cured layer on a substrate, comprising:
- applying a layer of a photocurable composition directly on the substrate, wherein the photocurable composition comprises a polymerizable material and a photoinitiator, the polymerizable material comprising at least one first monomer and at least one second monomer, the at least one first monomer including 1 wt % to 10 wt % of an isocyanate group containing compound of formula (1):
- R1-R2—N═C═O (1), with R1 including a carbon-carbon double bond, and R2 being substituted or unsubstituted alkyl or aryl, and a viscosity of the photocurable composition is not greater than 30 mPa·s;
- bringing the photocurable composition into contact with an imprint template or a superstrate;
- irradiating the photocurable composition with light to form a photo-cured layer;
- and
- removing the imprint template or superstrate from the photo-cured layer.
A method of manufacturing an article, comprising:
- applying a layer of a photocurable composition on a substrate, wherein the photocurable composition comprises a polymerizable material and a photoinitiator, the polymerizable material comprising at least one first monomer and at least one second monomer, the at least one first monomer including 1 wt % to 10 wt % of an isocyanate group containing compound of formula (1):
- R1-R2—N═C═O (1), with R1 including a carbon-carbon double bond, and R2 being substituted or unsubstituted alkyl or aryl, and a viscosity of the photocurable composition is not greater than 30 mPa·s;
- bringing the photocurable composition into contact with an imprint template or a superstrate;
- irradiating the photocurable composition with light to form an at least partially photo-cured layer;
- removing the imprint template or the superstrate from the at least partially photo-cured layer;
- forming a pattern on the substrate;
- processing the substrate on which the pattern has been formed in the forming;
- and
- manufacturing an article from the substrate processed in the processing.
Dependencies are inferred from the claim text.