Cobalt complex, method for manufacturing same, and method for manufacturing cobalt-containing thin film

A method for producing a cobalt complex represented by the following formula (1AB), which comprises reacting a bisamide complex represented by the following formula (2) and an aminoalkylamine represented by the following formula (3):

• wherein R1 and R2 independently represent a C1-6 alkyl group or a tri(C1-6 alkyl)silyl group, D represents a neutral ligand, and n represents 0 or 1;
• wherein R3 represents a tri(C1-6 alkyl)silyl group, R4 and R5 independently represent a C1-6 alkyl group, and X represents a C1-6 alkylene group;
• wherein R1 and R2 are as defined for R1 and R2 in the above formula (2), R3, R4, R5 and X are as defined for R3, R4, R5 and X in the above formula (3).

A method for producing a cobalt complex represented by the following formula (1BC), which comprises reacting a cobalt complex represented by the following formula (1AB) and a hetero atom-containing compound represented by the following formula (4):

• wherein R1 and R2 independently represent a C1-6 alkyl group or a tri(C1-6 alkyl)silyl group, R3 represents a tri(C1-6 alkyl)silyl group, R4 and R5 independently represent a C1-4 alkyl group, and X represents a C1-6 alkylene group;
• wherein R6 and R8 independently represent a C1-6 alkyl group, R7 represents a hydrogen atom or a C1-4 alkyl group, Y represents an oxygen atom or NR9, Z represents an oxygen atom or NR10 and R9 and R10 independently represent a C1-6 alkyl group;
• wherein R3, R4, R5 and X are as defined for R3, R4, R5 and X in the above formula (1AB), and R6, R7, R8, Y and Z are as defined for R6, R7, R8, Y and Z in the above formula (4).