Carbon nanotube array and its production method, and spun carbon nanotube yarn and its production method

A method for producing a carbon nanotube array constituted by a plurality of carbon nanotubes vertically aligned on a substrate, comprising

• supplying a carbon source gas into a reaction vessel consisting of a hydrogen gas atmosphere, in which a substrate on which a reaction catalyst comprising metal particles is formed is placed, and keeping a reaction temperature of 500-1100° C. for 0.5-30 minutes to form the carbon nanotube array of vertically aligned carbon nanotubes on said substrate;
• and
• heat-treating said carbon nanotube array by keeping the substrate on which said plurality of carbon nanotubes are formed at 400-900° C. for 0.5-180 minutes in a non-oxidizing atmosphere,
• wherein the heat treating of said carbon nanotube array is conducted in a hydrogen gas atmosphere, in a mixed gas atmosphere of a hydrogen gas and an inert gas, or in a vacuum,
• said method further comprising, prior to supplying the carbon source gas, heating the substrate on which a metal film is formed at 200-500° C. for 1-10 minutes in a hydrogen gas atmosphere to form the metal particles in said metal film, thereby forming said reaction catalyst on the substrate.