Apparatus and method to deliver organic material via organic vapor jet printing (OVJP)

An apparatus comprising:

• a device comprising:
• a micronozzle array;
• a first gas distribution plate that is irreversibly joined to the micronozzle array with a seal that is gas-tight, wherein the first gas distribution plate includes a plurality of sealed flow paths;
• one or more thermal evaporation sources in fluid communication with the first gas distribution plate;
• and
• a manifold, wherein the first gas distribution plate is reversibly joined to the manifold,
• wherein the manifold is in fluid communication with the micronozzle array through the plurality of sealed flow paths within the first gas distribution plate,
• wherein at least one of these flow paths carries a mixture of organic vapor and inert carrier gas, and
• wherein the first gas distribution plate has a segment proximal to the micronozzle array through which all flow paths pass and a depth of the segment no wider than a depth of the micronozzle array at its point of attachment, and
• a thermally conductive plate, wherein the first gas distribution plate and the thermally conductive plate are in thermal contact with a source of active cooling, and
• wherein the thermally conductive plate has at least one window passing through its full thickness through which the device may protrude such that a short axis of a cross section of the window has a dimension to provide a clearance fit at least for at least the micronozzle array of the device across a range of motion of the device relative to the thermally conductive plate so that the thermally conductive plate shields objects upon which the micronozzle array acts from heat generated by the manifold and the one or more thermal evaporation sources.