Ion source
AssigneeHitachi High-Tech Corporation
InventorsHideki Hasegawa, Masuyuki Sugiyama, Yuichiro Hashimoto
Life of this patent
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Abstract
An object of the present invention is to improve the safety and stability of an ion source by making a temperature distribution of a heated gas uniform while ensuring heat insulating properties. The ion source according to the present invention includes a gas introduction port inside a probe holder that holds an ion probe. A heater that increases the temperature of a heated gas and the gas introduction port are connected by a plurality of pipes which extend along an extending direction of the ion probe and are independent of each other (see FIG. 4).
Claims13
An ion source, which ionizes a sample, comprising:
- a probe through which a solution containing the sample passes;
- a heated gas injection port which injects an inert heating gas that heats a substance injected from the probe;
- a heater which increases a temperature of the inert heating gas before the heated gas injection port injects the inert heating gas;
- and
- a gas introduction port which supplies the inert heating gas to the ion source,
- wherein the heater includes first and second heater gas inlets that receive the inert heating gas supplied from the gas introduction port to the ion source,
- the gas introduction port and the first heater gas inlet are connected by a first pipe extending along an extending direction of the probe,
- the gas introduction port and the second heater gas inlet are connected by a second pipe extending along the extending direction of the probe,
- the first pipe and the second pipe are configured as pipes having flow paths independent from each other,
- the heater is arranged so as to surround an outer surface of the probe along the extending direction of the probe, and
- the first pipe and the second pipe are arranged so as to extend along the extending direction of the probe in a space between the gas introduction port and the heater.
Dependencies are inferred from the claim text.