Heat-loss pressure microsensors

A heat-loss pressure microsensor for measuring a gas pressure in an environment, comprising:

• a substrate;
• a first pressure gauge arranged on the substrate, the first pressure gauge comprising:
• a first thermistor having an electrical resistance that varies in accordance with a temperature of the first thermistor, the temperature of the first thermistor being responsive to the gas pressure in the environment;
• a first platform configured to receive the first thermistor;
• and a first support structure configured to hold the first platform above the substrate, wherein the first pressure gauge is configured to produce a first gauge output signal related to the electrical resistance of the first thermistor;
• and
• a second pressure gauge arranged on the substrate proximate to the first pressure gauge, the second pressure gauge comprising:
• a second thermistor having an electrical resistance that varies in accordance with a temperature of the second thermistor, the temperature of the second thermistor being responsive to the gas pressure in the environment;
• a second platform configured to receive the second thermistor;
• and a second support structure configured to hold the second platform above the substrate, wherein the second pressure gauge is configured to produce a second gauge output signal related to the electrical resistance of the second thermistor,
• wherein the first platform and the second platform are configured to have equal nominal perimeters and different nominal surface areas,
• wherein the first support structure and second support structure are configured to have a same nominal geometry, and
• wherein a differential signal obtained from the first and second gauge output signals conveys information about the gas pressure in the environment.