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US 11,747,229 B2Granted
Frequency-modulating sensor array
AssigneeSiTime Corporation
InventorsPaul M. Hagelin, Charles I. Grosjean, Lev Goncharov
Life of this patent
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Abstract
Spatially-distributed resonant MEMS sensors are coordinated to generate frequency-modulated signals indicative of regional contact forces, ambient conditions and/or environmental composition.
Claims20
A device comprising:
- a material having first and second regions;
- microelectromechanical systems (MEMS) resonators respective to the first and second regions, each of the MEMS resonators having a respective frequency of resonant vibration that is to vary dependent on influence of a physical environmental property experienced at the respective region;
- and
- circuitry to produce a signal identifying a specific one of the first and second regions as a function of relative variation in the respective frequencies of resonant vibration.
1 more element
A device comprising:
- a material having first and second regions;
- microelectromechanical systems (MEMS) resonators respective to the first and second regions, each of the MEMS resonators having a respective frequency of resonant vibration that is to vary dependent on influence of a physical environmental property experienced at the respective region;
- and
- circuitry to sequentially read-out the respective frequency of resonant vibration of each of the MEMS resonators and to produce a signal identifying a specific one of the first and second regions as a function of relative variation in the sequentially-read-out respective frequencies of resonant vibration of the MEMS resonators.
1 more element
A device comprising:
- a force input surface comprising a material having first and second regions;
- microelectromechanical systems (MEMS) resonators respective to the first and second regions, each of the MEMS resonators having a respective frequency of resonant vibration, wherein each respective frequency of resonant vibration is vary so as to modulate sensed influence of a physical environmental property experienced at the respective region;
- circuitry to excite each of the M EMS resonators to the respective frequency of resonant vibration;
- and
- circuitry to demodulate the sensed influence of the physical environmental property experienced at the respective region, and to produce a signal identifying a specific one of the first and second regions, as a function of relative variation in the respective frequencies of resonant vibration.
2 more elements
Dependencies are inferred from the claim text.