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US 11,747,173 B2Granted
Scale and manufacturing method of the same
AssigneeMitutoyo Corporation
InventorToshihiko Aoki
Life of this patent
Estimating the term…
Abstract
A scale includes a base material, an intermediate layer of soft magnetic material formed on one surface of the base material and roughened on face thereof opposite to the base material, and a scale pattern of a conductor formed on the intermediate layer.
Claims10
A scale comprising:
- a base material;
- an intermediate layer of soft magnetic material formed on one surface of the base material and roughened on a face thereof opposite to the base material;
- and
- a plurality of scale patterns of a conductor formed on the roughened face of the intermediate layer,
- wherein the roughened face of the intermediate layer opposite to the base material extends along a direction in which the scale patterns are arrayed at intervals.
2 more elements
A manufacturing method of a scale comprising:
- preparing an intermediate body in which an intermediate layer of a soft magnetic material having a roughened surface opposite to a base material is formed on one surface of the base material, and a conductor layer is provided on the intermediate layer;
- and
- forming a plurality of scale patterns on the roughened surface by forming a patterning of the conductor layer,
- wherein the roughened surface of the intermediate layer extends along a direction in which the scale patterns are arrayed at intervals.
1 more element
A manufacturing method of a scale comprising:
- preparing an intermediate body in which an intermediate layer of a soft magnetic material and a conductor are laminated on a base material in this order;
- forming a plurality of scale patterns by forming a patterning of the conductor;
- and
- roughening an exposed portion of the intermediate layer, said exposed portion extending along a direction in which the scale patterns are arrayed at intervals.
1 more element
Dependencies are inferred from the claim text.