Lattice coat surface enhancement for chamber components
AssigneeApplied Materials, Inc.
InventorsLit Ping Lam, Sriskantharajah Thirunavukarasu, Ian Ong
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Abstract
Disclosed are embodiments for an engineered feature formed as a part of or on a chamber component. In one embodiment, a chamber component for a processing chamber includes a component part body having unitary monolithic construction. The component part body has an outer surface. An engineered complex surface is formed on the outer surface. The engineered complex surface has a first lattice framework formed from a plurality of first interconnected laths and a plurality of first openings are bounded by three or more laths of the plurality of laths.
Claims14
A chamber component for a processing chamber, the chamber component comprising:
- a component part body, the component part body having an outer surface;
- and
- an engineered complex surface disposed on the outer surface, the engineered complex surface comprising:
- a first lattice framework formed from a plurality of first interconnected laths, and wherein first openings are bounded by three or more laths of the plurality of first interconnected laths;
- and
- a first spacer lath extending between the first lattice framework and the outer surface of the component part body, wherein the first spacer lath is in contact with the first lattice framework and the outer surface of the component part body wherein the first spacer lath creates a gap of space preventing the first lattice framework from touching the outer surface.
Dependencies are inferred from the claim text.