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US 11,736,087 B2Granted
Coupled MEMS resonator
AssigneeKYOCERA Tikitin Oy
InventorAntti Jaakkola
Life of this patent
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Abstract
A microelectromechanical resonator assembly includes a first rectangular resonator array and a second rectangular resonator array, where the first rectangular resonator array and the second rectangular resonator array each have at least two rectangular resonator sub-elements, and the at least two rectangular resonator sub-elements are coupled to each other by one or more connection elements, and the first rectangular resonator array and the second rectangular resonator array are coupled to each other by one or more connection elements.
Claims20
A microelectromechanical resonator assembly, comprising:
- a first rectangular resonator array;
- and
- a second rectangular resonator array, wherein
- the first rectangular resonator array and the second rectangular resonator array each comprise at least two rectangular resonating sub-elements, and the at least two rectangular resonating sub-elements are coupled to each other by one or more connection elements, and the first rectangular resonator array and the second rectangular resonator array are coupled to each other by one or more connection elements.
1 more element
Dependencies are inferred from the claim text.