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US 11,735,458 B2Granted
Ceramic mixture paste, porous body, electrostatic chuck, and substrate fixing device
AssigneeShinko Electric Industries Co., Ltd.
InventorTomotake Minemura
Life of this patent
Estimating the term…
Abstract
A ceramic mixture paste includes oxide ceramic particles, burn-off particles, and a firing aid. The burn-off particles are burned off at a temperature lower than the firing temperature of the oxide ceramic particles. The firing aid melts at a temperature lower than the firing temperature. The ratio of the volume of the burn-off particles to the volume of the oxide ceramic particles is more than 0% and less than or equal to 20%.
Claims6
A ceramic mixture paste comprising:
- oxide ceramic particles;
- burn-off particles that are burned off at a temperature lower than a firing temperature of the oxide ceramic particles;
- and
- a firing aid that melts at a temperature lower than the firing temperature,
- wherein the oxide ceramic particles, the burn-off particles, and the firing aid are mixed in paste form, and
- a ratio of a volume of the burn-off particles to a volume of the oxide ceramic particles is more than 0% and less than or equal to 20%.
3 more elements
A porous body comprising:
- oxide ceramic particles;
- and
- a firing aid binding the oxide ceramic particles,
- wherein a porosity of the porous body is more than 30% and less than or equal to 43%.
1 more element
An electrostatic chuck comprising:
- a base including a through hole, the base being configured to attract and hold a substrate;
- and
- a porous body in the through hole, the porous body including spherical oxide ceramic particles as a principal component, the porous body including pores that form a gas passage, the porous body having a porosity of more than 30% and less than or equal to 43%,
- wherein an average size of the pores is greater than an average size of the spherical oxide ceramic particles.
1 more element
Dependencies are inferred from the claim text.