Magnetic sensor
AssigneeShowa Denko K.K.
InventorsSho Tonegawa, Akira Sakawaki, Rimpei Kindaichi
Life of this patent
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Abstract
Sensitivity of a magnetic sensor using the magnetic impedance effect is improved. A magnetic sensor includes: a non-magnetic substrate; a sensitive element provided on the substrate, including a soft magnetic material, having a longitudinal direction and a short direction, provided with uniaxial magnetic anisotropy in a direction intersecting the longitudinal direction, and sensing a magnetic field by a magnetic impedance effect; and a protrusion part including a soft magnetic material and protruding from an end portion in the longitudinal direction of the sensitive element.
Claims14
A magnetic sensor comprising:
- a non-magnetic substrate;
- a sensitive element provided on the substrate, including a soft magnetic material, having a longitudinal direction and a short direction, provided with uniaxial magnetic anisotropy in a direction intersecting the longitudinal direction, and sensing a magnetic field by a magnetic impedance effect;
- and
- a protrusion part including a soft magnetic material and protruding from an end portion in the longitudinal direction of the sensitive element, wherein
- the sensitive element and the protrusion part are in contact.
A magnetic sensor comprising:
- a non-magnetic substrate;
- a plurality of sensitive elements arranged in a short direction with gaps, each of the sensitive elements being provided on the substrate, including a soft magnetic material, having a longitudinal direction and the short direction, being provided with uniaxial magnetic anisotropy in a direction intersecting the longitudinal direction, and sensing a magnetic field by a magnetic impedance effect;
- a connection part connecting end portions in the longitudinal direction of the sensitive elements that are adjacent in the short direction;
- and
- a protrusion part included in at least one of the sensitive elements, the protrusion part including a soft magnetic material and protruding from an end portion in the longitudinal direction of the sensitive element, wherein
- the protrusion part is in contact with at least one sensitive element of the plurality of sensitive elements.
Dependencies are inferred from the claim text.