Fluorescent X-ray analysis apparatus comprising a plurality of X-ray detectors and an X-ray irradiation unit including a multi-wavelength mirror

A fluorescent X-ray analysis apparatus comprising:

• an X-ray irradiation unit for irradiating a sample containing a plurality of elements with X-rays;
• an X-ray detection unit for detecting fluorescent X-rays emitted from the sample;
• and
• a controller,
• wherein the X-ray irradiation unit comprises an X-ray source for emitting continuous X-rays, and a multi-wavelength mirror to which the continuous X-rays emitted from the X-ray source are incident,
• wherein the X-ray irradiation unit is configured to focus on a specific measurement target element selected as a measurement target from the plurality of elements contained in the sample and an adjacent element, from the plurality of elements contained in the sample, having an energy absorption edge value larger than an energy absorption edge value of the specific measurement target element, and irradiate the sample with X-rays having energy values, which are larger than the energy absorption edge value of the specific measurement target element and are equal to or less than the energy absorption edge value of the adjacent element,
• wherein with respect to a measurement target element for which there is no adjacent element having a larger energy absorption edge value among a plurality of other measurement target elements selected as measurement targets from the plurality of elements contained in the sample, the X-ray irradiation unit is configured so that the sample is also irradiated with X-rays having an energy value larger than an energy absorption edge value of the measurement target element,
• wherein the X-ray detection unit comprises a plurality of X-ray detectors and X-ray shielding doors, and the plurality of X-ray detectors are arranged around an X-ray irradiation site of the sample to be irradiated with X-rays from the X-ray irradiation unit in such a posture as to take the fluorescent X-rays emitted from the sample, each X-ray shielding door of the X-ray shielding doors for shielding X-rays is provided between the sample and each of the plurality of X-ray detectors so as to be freely openable and closable, and
• wherein the controller is configured to close X-ray shielding doors for X-ray detectors among the plurality of X-ray detectors having detected X-rays diffracted from the sample.

A fluorescent X-ray analysis apparatus comprising:

• an X-ray irradiation unit for irradiating a sample containing a plurality of elements with X-rays;
• an X-ray detection unit for detecting fluorescent X-rays emitted from the sample;
• and
• an analysis unit,
• wherein the X-ray irradiation unit comprises an X-ray source for emitting continuous X-rays, and a multi-wavelength mirror to which the continuous X-rays emitted from the X-ray source are incident,
• wherein the X-ray irradiation unit is configured to focus on a specific measurement target element selected as a measurement target from the plurality of elements contained in the sample and an adjacent element, from the plurality of elements contained in the sample, having an energy absorption edge value larger than an energy absorption edge value of the specific measurement target element, and irradiate the sample with X-rays having energy values, which are larger than the energy absorption edge value of the specific measurement target element and are equal to or less than the energy absorption edge value of the adjacent element,
• wherein with respect to a measurement target element for which there is no adjacent element having a larger energy absorption edge value among a plurality of other measurement target elements selected as measurement targets from the plurality of elements contained in the sample, the X-ray irradiation unit is configured so that the sample is also irradiated with X-rays having an energy value larger than an energy absorption edge value of the measurement target element,
• wherein the X-ray detection unit comprises a plurality of X-ray detectors, and the plurality of X-ray detectors are arranged around an X-ray irradiation site of the sample to be irradiated with X-rays from the X-ray irradiation unit in such a posture as to take the fluorescent X-rays emitted from the sample, and
• wherein the analysis unit is configured to exclude detection signals from X-ray detectors among the plurality of X-ray detectors having detected X-rays diffracted from the sample, and perform a fluorescent X-ray analysis based on detection signals from the other X-ray detectors among the plurality of X-ray detectors.

A fluorescent X-ray analysis method comprising:

• irradiating a sample containing a plurality of elements with X-rays;
• detecting fluorescent X-rays emitted from the sample;
• and
• focusing on a measurement target element selected as a measurement target from the plurality of elements contained in the sample and an adjacent element, from the plurality of elements contained in the sample, having an energy absorption edge value larger than an energy absorption edge value of the measurement target element to irradiate the sample with X-rays having energy values, which are larger than the energy absorption edge value of the measurement target element and are equal to or less than the energy absorption edge value of the adjacent element.

A fluorescent X-ray analysis method comprising:

• irradiating a sample containing a plurality of elements with X-rays;
• detecting fluorescent X-rays emitted from the sample;
• focusing on a specific measurement target element selected as a measurement target from the plurality of elements contained in the sample and an adjacent element, from the plurality of elements contained in the sample, having an energy absorption edge value larger than an energy absorption edge value of the specific measurement target element to irradiate the sample with X-rays having energy values, which are larger than the energy absorption edge value of the specific measurement target element and are equal to or less than the energy absorption edge value of the adjacent element;
• and
• with respect to a measurement target element for which there is no adjacent element having a larger energy absorption edge value among a plurality of other measurement target elements selected as measurement targets from the plurality of elements contained in the sample, irradiating the sample with X-rays having an energy value larger than an energy absorption edge value of the measurement target element.