Cryopump and regeneration method of cryopump

A regeneration method of a cryopump, the method comprising:

• increasing a temperature of the cryopump to a melting point of a target gas, among gases captured in the cryopump, or a temperature exceeding the melting point;
• and
• exhausting a liquefied product of the target gas to a vent valve from one of three sources, the three sources including a first source associated with a container body of a cryopump container through a first exhaust passage, from a second source associated with a cryocooler accommodating tube of the cryopump container through a second exhaust passage, and a third source associated with a combination of the container body through the first exhaust passage and the cryocooler accommodating tube through the second exhaust passage,
• wherein the first exhaust passage includes a first exhaust port provided in the container body and is disposed outside the cryopump container, and
• the second exhaust passage includes a second exhaust port provided in the cryocooler accommodating tube and merges with the first exhaust passage between the first exhaust port and the vent valve.

A cryopump comprising:

• a cryocooler;
• a cryopanel that is cooled by the cryocooler;
• a cryopump container that includes a container body, which accommodates the cryopanel, and a cryocooler accommodating tube of which one end is coupled to the container body and the other end is fixed to the cryocooler and into which the cryocooler is inserted;
• a purge valve that is provided at the cryocooler accommodating tube and is for supplying purge gas to the cryopump container;
• a first exhaust passage that includes a first exhaust port provided in the container body;
• a second exhaust passage that includes a second exhaust port provided in the cryocooler accommodating tube;
• and
• a switching control valve that is capable of closing the second exhaust passage when the purge gas is supplied from the purge valve.

A regeneration method of a cryopump, the method comprising:

• increasing a temperature of the cryopump to a melting point of a target gas, among gases captured in the cryopump, or a temperature exceeding the melting point;
• exhausting a liquefied product of the target gas to an outside of a cryopump container through one of three exhaust ports, the three exhaust ports including a first exhaust port of a container body of the cryopump container, through a second exhaust port of a cryocooler accommodating tube of the cryopump container, and a third exhaust port that is a combination of the first exhaust port and the second exhaust port;
• and
• exhausting purge gas from an exhaust port, among the first exhaust port and the second exhaust port, which is farther from a purge valve, in a state where an exhaust port, among the first exhaust port and the second exhaust port, which is closer to the purge valve, is closed when the purge gas is supplied from the purge valve to the cryopump container.