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US 11,732,374 B2Granted
Reaction products of amine monomers and polymers containing saturated heterocyclic moieties as additives for electroplating baths
AssigneesRohm and Haas Electronic Materials LLC, Dow Global Technologies LLC
InventorsLingli Duan, Chen Chen, Tong Sun, Zukhra I. Niazimbetova, Maria Anna Rzeznik
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Abstract
Reaction products of amines and polymers containing saturated heterocyclic moieties may be used as levelers in metal electroplating baths. The reaction products may plate metal with good surface properties and good physical reliability.
Claims2
A reaction product of one or more amine monomers and one or more polymers, the one or more polymers have the formula:
- where R1 and R2 can be the same or different and comprise hydrogen, linear or branched (C1-C5)alkyl, hydroxyl, linear or branched (C1-C5)hydroxyalkyl, linear or branched (C1-C5)carboxyalkyl, linear or branched (C1-C5)alkoxy, linear or branched (C1-C5)haloalkyl, aryl, linear or branched arylalkyl, or linear or branched, aminoalkyl and m is an integer of 2-8.
Dependencies are inferred from the claim text.