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US 11,731,085 B2Granted
Coated porous polymeric membranes
AssigneeEntegris, Inc.
InventorsJad Ali Jaber, Saksatha Ly, James Hamzik, Testu Kohyama
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Abstract
The present disclosure provides a porous polymeric membrane that is coated with a cross-linked polymerized monomer. The coating on the porous polymeric membrane has a charge when it is immersed in an organic liquid. The coated porous polymeric membrane, a filter utilizing the membrane, and a method for treating an organic liquid used for photoresist with the coated porous polymeric membrane to remove metal contaminants from the organic liquid are disclosed.
Claims10
A method of removing metal contaminants from an organic liquid used for photoresist, the method comprising:
- passing the organic liquid through a first coated porous polymeric membrane comprising a first porous polymeric membrane having a first polymer coating on surfaces thereof, wherein the first polymer coating is crosslinked and not grafted to the first porous polymeric membrane surfaces and comprises a first polymerized monomer comprising a positive charge in the organic liquid, and wherein the first polymer coating is crosslinked with a cross-linking agent selected from the group consisting of 1,6-hexanediol diacrylate, tetraethylene glycol diacrylate, 1,1,1-trimethylolpropane triacrylate, and combinations thereof;
- and
- removing a portion of the metal contaminants from the organic liquid, wherein the organic liquid used for photoresist has a lower concentration of the metal contaminants after passing through the first coated porous polymeric membrane.
Dependencies are inferred from the claim text.