Detecting apparatus
AssigneeDisco Corporation
InventorsKazuki Mori, Ryohei Yamamoto
Life of this patent
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Abstract
A detecting apparatus for use in specifying regions having different impurity concentrations in an ingot includes an ingot holding unit having a holding surface for holding the ingot thereon, an excitation light source for applying excitation light having a predetermined wavelength to a face side of the ingot held on the holding surface, and a photodetector for detecting fluorescence emitted from the ingot upon exposure to the excitation light and generating an electric signal representing a number of photons of only light whose wavelength is in an infrared radiation range, of the detected fluorescence.
Claims7
A detecting apparatus for use in specifying regions having different impurity concentrations in an ingot, comprising:
- an ingot holding unit having a holding surface for holding the ingot thereon;
- an excitation light source for applying excitation light having a predetermined wavelength to a face side of the ingot held on the holding surface;
- an annular elliptical mirror having a curved inner reflecting surface that reflects fluorescence emitted from the ingot upon exposure to the excitation light;
- and
- a photodetector for detecting the fluorescence reflected from the curved inner reflecting surface of the annular elliptical mirror and generating an electric signal representing a number of photons of only light whose wavelength is in an infrared radiation range, of the detected fluorescence.
Dependencies are inferred from the claim text.