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US 11,725,577 B2Granted
Oscillating assembly, exhaust system and method of using
AssigneeTaiwan Semiconductor Manufacturing Company, Ltd.
InventorsPo-Hsuan Huang, Tung-Lin Yang
Life of this patent
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Abstract
An exhaust system includes an exhaust line configured to receive an exhaust mixture. The exhaust system further includes an oscillating assembly connected to the exhaust line. The exhaust system further includes a feedback path extending from an external gas source to the oscillating assembly, wherein the feedback path is separate from the exhaust line.
Claims20
An exhaust system comprising:
- an exhaust line configured to receive an exhaust mixture;
- an oscillating assembly connected to the exhaust line;
- and
- a feedback path extending from an external gas source to the oscillating assembly, wherein the feedback path is separate from the exhaust line.
1 more element
A method of using an exhaust system configured for production of semiconductors and componentry thereof, the method comprising:
- activating an oscillating assembly connected to an exhaust line, wherein the oscillating assembly is configured to vibrate the exhaust line;
- measuring a value indicating a flow of particles through the exhaust line;
- and
- increasing a rate of vibration of the exhaust line in response to the value being below a predetermined threshold value.
1 more element
An oscillating assembly comprising:
- an oscillator configured to attach to an exhaust line for carrying an exhaust mixture comprising particles;
- a feedback path extending from an external gas source to the oscillator, wherein the feedback path is separate from the exhaust line;
- and
- a controller for controlling a flow rate of gas from the external gas source to the oscillator based on a detected flow rate within the exhaust line.
1 more element
Dependencies are inferred from the claim text.