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US 11,722,096 B2Granted
Oven controlled MEMS oscillator with multiple temperature control loops
AssigneeTexas Instruments Incorporated
InventorsBichoy Bahr, Baher Haroun, Swaminathan Sankaran, Argyrios Dellis, Sachin Kalia
Life of this patent
Estimating the term…
Abstract
In an example, a system includes a BAW resonator. The system also includes a first heater configured to heat the BAW resonator, where the first heater is controlled by a first control loop. The system includes a circuit coupled to the BAW resonator. The system also includes a second heater configured to heat the circuit, where the second heater is controlled by a second control loop.
Claims13
A system, comprising:
- a bulk acoustic wave (BAW) resonator;
- a BAW die;
- a first heater configured to heat the BAW resonator, wherein the first heater is controlled by a first control loop;
- a circuit coupled to the BAW resonator;
- and
- a second heater configured to heat the circuit, wherein the second heater is controlled by a second control loop,
- wherein the BAW resonator and the first heater are directly coupled to each other and anchored to a portion of the BAW die such that the BAW resonator is spaced from the BAW die and the first heater partially encloses the BAW die.
4 more elements
A system, comprising:
- a bulk acoustic wave (BAW) resonator on a BAW die;
- a first heater configured to heat the BAW resonator, wherein the first heater is a resistive heater configured to be controlled by a first control loop;
- a circuit die;
- a circuit on the circuit die and coupled to the BAW resonator;
- a second heater configured to heat the circuit, wherein the second heater is configured to be controlled by a second control loop;
- and
- a third heater disposed between the circuit die and the BAW resonator and configured to heat the BAW die, wherein the third heater is configured to be controlled by a third control loop.
4 more elements
A system, comprising:
- a bulk acoustic wave (BAW) resonator on a BAW die;
- a first heater configured to heat the BAW resonator, wherein the first heater is a resistive heater configured to be controlled by a first control loop;
- a circuit coupled to the BAW resonator;
- a second heater configured to heat the circuit, wherein the second heater is configured to be controlled by a second control loop;
- and
- a third heater configured to heat the BAW die, wherein the third heater is configured to be controlled by a third control loop,
- wherein the BAW resonator and the first heater are located on a cantilevered anchor attached to the BAW die.
4 more elements
A system comprising:
- a bulk acoustic wave (BAW) resonator;
- a BAW die;
- a first heater configured to heat the BAW resonator, wherein the first heater is controlled by a first control loop;
- a circuit coupled to the BAW resonator;
- and
- a second heater configured to heat the circuit, wherein the second heater is controlled by a second control loop,
- wherein the BAW resonator and the first heater are directly coupled to each other and anchored to a portion of the BAW die, and wherein the BAW resonator and the first heater are a single integrated component that also includes an isolation trench configured to thermally isolate the first heater from other components of the system.
4 more elements
Dependencies are inferred from the claim text.