Stress compensation for wafer to wafer bonding
AssigneeIntel Corporation
InventorsAnant Jahagirdar, Chytra Pawashe, Aaron Lilak, Myra McDonnell, Brennen Mueller, Mauro Kobrinsky
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AssigneeIntel Corporation
InventorsAnant Jahagirdar, Chytra Pawashe, Aaron Lilak, Myra McDonnell, Brennen Mueller, Mauro Kobrinsky
Estimating the term…
Embodiments herein describe techniques for bonded wafers that includes a first wafer bonded with a second wafer, and a stress compensation layer in contact with the first wafer or the second wafer. The first wafer has a first stress level at a first location, and a second stress level different from the first stress level at a second location. The stress compensation layer includes a first material at a first location of the stress compensation layer that induces a third stress level at the first location of the first wafer, a second material different from the first material at a second location of the stress compensation layer that induces a fourth stress level different from the third stress level at the second location of the first wafer. Other embodiments may be described and/or claimed.
An apparatus of bonded wafers, comprising:
A computing device, comprising:
Dependencies are inferred from the claim text.