System and method for reducing the charging effect in a transmission electron microscope system

A charged particle microscope for investigating a sample, the microscope comprising:

• a charged particle emitter configured to emit a charged particle beam towards a sample;
• a sample holder configured to hold the sample;
• a detector system configured to detect emissions resultant from the irradiation of the sample with the charged particle beam;
• one or more processors;
• and
• a memory, wherein the memory stores non-transitory computer readable instructions that, when executed on the one or more processors, cause the system to:
• irradiate a first location on the sample during a first time period, wherein the irradiating the first location on the sample causes a gradual deposit of charge in the first location on the sample;
• generate, with a detector system, imaging data based on emissions resultant from irradiating the first location on the sample;
• irradiate a second location on the sample holder for a second time period, wherein the irradiating the second location on the sample holder causes secondary electrons to be released to compensate the deposit of charge;
• and
• iteratively repeat the irradiation of the first location and the second location during imaging of the sample region.

A computer readable medium storing non-transitory computer readable instructions that, when executed on one or more processors, cause the one or processors system to cause a charged particle microscope system to:

• irradiate a first location on a sample during a first time period, wherein the irradiating the first location on the sample causes a gradual deposit of charge in the first location on the sample;
• generate, with a detector system, imaging data based on emissions resultant from irradiating the first location on the sample;
• irradiate a second location on a sample holder for a second time period, wherein the irradiating the second location on the sample holder causes secondary electrons to be released to compensate the deposit of charge;
• and
• iteratively repeat the irradiation of the first location and the second location during imaging of the sample region.