Method and system for inspecting growth quality of graphene

A method of inspecting a growth quality of a graphene layer of a graphene-grown copper foil obtained by growing the graphene layer on a copper foil layer by chemical vapor deposition (CVD), the method comprising:

• reacting oxygen or water molecules with the copper foil layer via a defect portion of the graphene layer;
• partitioning an entire region of the graphene-grown copper foil into partial regions;
• sequentially obtaining images of the partial regions of the graphene layer, wherein at least one of the images of the partial regions shows the graphene layer comprising one or more domain boundaries and one or more wrinkles of the copper foil layer, wherein the domain boundaries in the graphene layer are at a surface of the graphene-grown copper foil, and wherein the one or more wrinkles of the copper foil layer are below the surface of the graphene-grown copper foil;
• for each image including the one or more wrinkles, comparing gray scale change rates in the image to a reference value, wherein a first set of gray scale change rates in the images having values lower than the reference value are attributable to the one or more wrinkles, and wherein a second set of the gray scale change rates in the images having values higher than the reference value are attributable to the one or more domain boundaries;
• removing or filtering the one or more wrinkles of the copper foil layer by removing or filtering the grey scale change rates of which the values are lower than the reference value, leaving the one or more domain boundaries shown in the at least one of the images;
• after the removing or filtering, detecting, with respect to each of the images of the partial regions, an oxidized region where the copper foil layer is oxidized, and setting the oxidized region as a graphene defect region;
• and
• obtaining a ratio of an area of the graphene defect region to an entire area of each of the images of the partial regions.