Resonator coil having an asymmetrical profile
AssigneeApplied Materials, Inc.
InventorsCostel Biloiu, Michael Honan, Robert B. Vopat, David Blahnik, Charles T. Carlson, Frank Sinclair, Paul Murphy
Life of this patent
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Abstract
Embodiments herein are directed to a resonator for an ion implanter. In some embodiments, a resonator may include a housing, and a first coil and a second coil partially disposed within the housing. Each of the first and second coils may include a first end including an opening for receiving an ion beam, and a central section extending helically about a central axis, wherein the central axis is parallel to a beamline of the ion beam, and wherein an inner side of the central section has a flattened surface.
Claims19
A resonator, comprising:
- a conductive hollow tube, comprising:
- a first end coupled to a first electrode, the first electrode operable to accelerate ions;
- a central section connected to the first end, wherein the central section extends about a central axis, wherein an inner side of the central section has a flattened surface, and wherein an outer side of the central section has a curved surface;
- and
- a second end connected to the central section.
A resonator, comprising:
- a coil disposed within a housing, the coil comprising:
- a first end coupled to a first electrode, the first electrode operable to accelerate ions;
- a central section connected to the first end, wherein the central section extends helically about a central axis, wherein an inner side of the central section has a flattened surface, and wherein an outer side of the central section has a curved surface;
- and
- a second end connected to the central section, wherein an internal channel extending between the first and second ends is operable to transport a fluid.
A resonator of an ion implanter, the resonator comprising:
- a housing defining an internal cavity;
- a hollow coil partially disposed within the internal cavity, the hollow coil comprising:
- a first end coupled to a first electrode, the first electrode operable to accelerate ions;
- a central section connected to the first end, wherein the central section extends helically about a central axis, wherein an inner side of the central section has a flattened surface, and wherein an outer side of the central section has a curved profile;
- and
- a second end connected to the central section and to the housing.
Dependencies are inferred from the claim text.