Charged particle beam device and analysis method

A charged particle beam device comprising:

• a charged particle beam source;
• an energy applying unit that varies kinetic energy of a primary charged particle beam emitted from the charged particle beam source;
• an analyzer that analyzes and detects particles including secondary electrons and backscattered charged particles that are emitted from a specimen by irradiating the specimen with the primary charged particle beam;
• and
• an analysis unit that extracts a signal component of the backscattered charged particles based on a first spectrum obtained by detecting the particles with the analyzer in a state where the kinetic energy of the primary charged particle beam has been varied into first kinetic energy, and a second spectrum obtained by detecting the particles with the analyzer in a state where the kinetic energy of the primary charged particle beam has been varied into second kinetic energy different from the first kinetic energy
• wherein the analysis unit obtains a difference between the first spectrum and the second spectrum and extracts the signal component of the backscattered charged particles based on the difference.