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US 11,709,182 B2Granted
Electrical connecting device and inspection method
AssigneeKabushiki Kaisha Nihon Micronics
InventorShota Hetsugi
Life of this patent
Estimating the term…
Abstract
An electrical connecting device includes a probe head, and probes for measurement and probes for confirmation held by the probe head. The probe head holds the probes for measurement and the probes for confirmation in a state in which the respective tip ends are exposed therefrom. An exposed length from the probe head to the tip end is shorter for the probes for confirmation than for the probes for measurement.
Claims9
An electrical connecting device comprising:
- a probe head;
- a probe for measurement held by the probe head in a state in which a tip end is exposed from the probe head and used for a measurement of an inspection object;
- and
- a probe for confirmation held by the probe head in a state in which a tip end is exposed from the probe head and having a shorter tip-end length than the probe for measurement, the tip-end length being an exposed length from the probe head to the tip end;
- wherein the probe for measurement is brought into contact with the inspection object in a confirmation state in which the tip end of the probe for confirmation is also brought into contact with the inspection object, and an overdrive amount acting on the probe for measurement in the confirmation state is stored, the stored overdrive amount corresponding to a predetermined pressure or force to be applied to the probe for measurement during the measurement of the inspection object;
- wherein the tip end of the probe for measurement contacts the inspection object during the measurement of the inspection object;
- and
- wherein the probe for confirmation has a stepped structure in which a diameter changes at a part exposed from the probe head and a circumferential surface is recessed toward a middle, and the probe for confirmation is cut off or bent at a part provided with the stepped structure so that the tip end of the probe for confirmation does not contact the inspection object during the measurement of the inspection object.
5 more elements
An inspection method comprising:
- preparing a probe head configured to hold a probe for measurement and a probe for confirmation in a state in which tip ends of the probe for measurement and the probe for confirmation are exposed therefrom, the probe for confirmation having a shorter tip-end length which is an exposed length from the probe head to the tip end than the probe for measurement;
- decreasing a gap between the probe head and an object for inspection to bring the probe for measurement into contact with the object for inspection in a confirmation state in which the tip end of the probe for confirmation is also brought into contact with the object for inspection;
- storing an overdrive amount acting on the probe for measurement in the confirmation state, the stored overdrive amount corresponding to a predetermined pressure or force to be applied to the probe for measurement during a measurement of the object for inspection;
- wherein the tip end of the probe for measurement contacts the object for inspection during the measurement of the object for inspection;
- and
- wherein the probe for confirmation has a stepped structure in which a diameter changes at a part exposed from the probe head and a circumferential surface is recessed toward a middle, and the probe for confirmation is cut off or bent at a part provided with the stepped structure so that the tip end of the probe for confirmation does not contact the object for inspection during the measurement of the object for inspection.
3 more elements
Dependencies are inferred from the claim text.