Electronic device
AssigneeTaiyo Yuden Co., Ltd.
InventorsRyouta Iwabuchi, Motoi Yamauchi, Takashi Miyagawa, Tsutomu Kikuchi, Yuki Maruya
Life of this patent
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Abstract
An electronic device includes a support substrate, a piezoelectric layer that is provided on the support substrate, a functional element including an electrode provided on a surface of the piezoelectric layer, a metallic frame body that is provided on the support substrate so as to surround the piezoelectric layer and the functional element in a plan view, a metallic lid that is provided on the frame body so as to form a space between the lid and the support substrate, and seals the functional element into the space, and a columnar body that is provided between the support substrate and the lid in the space.
Claims11
An electronic device comprising:
- a support substrate;
- a piezoelectric layer that is provided on the support substrate;
- a functional element including an electrode provided on a surface of the piezoelectric layer;
- a metallic frame body that is provided on the support substrate so as to surround the piezoelectric layer and the functional element in a plan view;
- a metallic lid that is provided on the frame body so as to form a space between the lid and the support substrate, and seals the functional element into the space;
- and
- a columnar body that is provided between the support substrate and the lid in the space,
- wherein one of end surfaces of the columnar body is in contact with the lid.
An electronic device comprising:
- a support substrate;
- a piezoelectric layer that is provided on the support substrate;
- a functional element including an electrode provided on a surface of the piezoelectric layer:
- a metallic frame body that is provided on the support substrate so as to surround the piezoelectric layer and the functional element in a plan view;
- a metallic lid that is provided on the frame body so as to form a space between the lid and the support substrate, and seals the functional element into the space:
- and
- a columnar body that is provided between the support substrate and the lid in the space, wherein the piezoelectric layer has a recess in which the piezoelectric layer is present on the bottom surface, and
- the columnar body is provided between the support substrate and the lid in the recess.
Dependencies are inferred from the claim text.