Piezoelectric device and method of manufacturing the same
AssigneeMurata Manufacturing Co., Ltd.
InventorsShinsuke Ikeuchi, Tetsuya Kimura, Katsumi Fujimoto, Yutaka Kishimoto, Fumiya Kurokawa
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Abstract
A piezoelectric device includes a piezoelectric single crystal body with a homogeneous polarization state and of which at least a portion flexurally vibrates, an upper electrode on an upper surface of the piezoelectric single crystal body, a lower electrode on a lower surface of the piezoelectric single crystal body, and a supporting substrate below the piezoelectric single crystal body. A recess extends from a lower surface of the supporting substrate toward the lower surface of the piezoelectric single crystal body.
Claims11
A piezoelectric device comprising:
- a piezoelectric single crystal body that has a homogeneous polarization state and of which at least a portion is configured to flexurally vibrate;
- an upper electrode disposed on an upper surface of the piezoelectric single crystal body;
- a lower electrode disposed on a lower surface of the piezoelectric single crystal body;
- and
- a supporting substrate disposed below the piezoelectric single crystal body;
- wherein
- a recess extends from a lower surface of the supporting substrate toward the lower surface of the piezoelectric single crystal body;
- and
- a space at a side of the piezoelectric single crystal body is exposed to the recess.
Dependencies are inferred from the claim text.