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US 11,706,968 B2Granted
Metal mask base, metal mask and method for producing metal mask
AssigneeToppan Printing Co., Ltd.
InventorsDaisei Fujito, Kiyoaki Nishitsuji, Takehiro Nishi
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Abstract
A metal mask substrate includes a metal obverse surface configured such that a resist is placed on the obverse surface. The obverse surface has a three-dimensional surface roughness Sa of less than or equal to 0.11 μm. The obverse surface also has a three-dimensional surface roughness Sz of less than or equal to 3.17 μm.
Claims15
A metal mask substrate comprising:
- a first surface which is made of metal, wherein
- the first surface has a three-dimensional surface roughness Sa of less than or equal to 0.11 μm, and
- the first surface has a three-dimensional surface roughness Sz of less than or equal to 3.17 μm;
- and
- a second surface, which is opposite to the first surface and made of metal, wherein
- the second surface has a three-dimensional surface roughness Sa of less than or equal to 0.11 μm, and
- the second surface has a three-dimensional surface roughness Sz of less than or equal to 3.17 μm.
4 more elements
Dependencies are inferred from the claim text.