Three-dimensional memory devices and fabrication methods thereof
AssigneeYangtze Memory Technologies Co., Ltd.
InventorsJun Liu, Li Hong Xiao
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AssigneeYangtze Memory Technologies Co., Ltd.
InventorsJun Liu, Li Hong Xiao
Estimating the term…
Embodiments of three-dimensional (3D) memory devices having a memory layer that confines electron transportation and methods for forming the same are disclosed. A method for forming a 3D memory device includes the following operations. An initial channel hole is formed in a stack structure having a plurality of first layers and a plurality of second layers alternatingly arranged over a substrate. A portion of each one of the plurality of first layers facing a sidewall of the initial channel hole is removed to form a channel hole. A semiconductor channel structure is formed in the channel hole. The semiconductor channel structure includes a memory layer following a profile of a sidewall of the channel hole. The plurality of first layers are removed to form a plurality of tunnels. Portions of the memory layer are removed, through the tunnels, to divide the memory layer into a plurality of disconnected sub-memory portions.
A method for forming a three-dimensional (3D) memory device, comprising:
A three-dimensional (3D) memory device, comprising:
Dependencies are inferred from the claim text.