Acoustic wave resonator with mass loading strip for suppression of transverse mode
AssigneeSkyworks Solutions, Inc.
InventorsYuya Hiramatsu, Rei Goto, Yumi Torazawa
Life of this patent
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Abstract
Aspects of this disclosure relate to an acoustic wave resonator with transverse mode suppression. The acoustic wave resonator can include a piezoelectric layer, an interdigital transducer electrode, a temperature compensation layer, and a mass loading strip. The mass loading strip can be a conductive strip. The mass loading strip can overlap edge portions of fingers of the interdigital transducer electrode. A layer of the mass loading strip can have a density that is at least as high as a density of a material of the interdigital transducer electrode. The material of the interdigital transducer can impact acoustic properties of the acoustic wave resonator.
Claims27
A surface acoustic wave resonator comprising:
- an interdigital transducer including a pair of interdigital transducer electrodes, each electrode having a bus bar and fingers extending from the bus bar to an edge portion, a gap region defined between the edge portion of the fingers of one of the electrodes and the bus bar of the other of the electrodes;
- and
- a mass loading strip overlapping the fingers of the electrodes and having a width that overlaps the edge portions of the fingers and extends into the gap region by up to 20% of a width of the gap region to thereby suppress a transverse mode of the interdigital transducer.
An acoustic wave filter comprising:
- one or more surface acoustic wave resonators configured to filter a radio frequency signal, each surface acoustic wave resonator including an interdigital transducer including a pair of interdigital transducer electrodes, each electrode having a bus bar and fingers extending from the bus bar to an edge portion, a gap region defined between the edge portion of the fingers of one of the electrodes and the bus bar of the other of the electrodes, and a mass loading strip overlapping the fingers of the electrodes and having a width that overlaps the edge portions of the fingers and extends into the gap region by up to 20% of a width of the gap region to thereby suppress a transverse mode of the interdigital transducer.
A radio frequency module comprising:
- a package substrate;
- a surface acoustic wave component including one or more surface acoustic wave resonators configured to filter a radio frequency signal, each surface acoustic wave resonator including a pair of interdigital transducer electrodes, each electrode having a bus bar and fingers extending from the bus bar to an edge portion, a gap region defined between the edge portion of the fingers of one of the electrodes and the bus bar of the other of the electrodes, and a mass loading strip overlapping the fingers of the electrodes and having a width that overlaps the edge portions of the fingers and extends into the gap region by up to 20% of a width of the gap region to thereby suppress a transverse mode of the interdigital transducer electrodes;
- and
- additional circuitry, the surface acoustic wave component and additional circuitry disposed on the package substrate.
A wireless communication device comprising:
- an antenna;
- and
- a front end module including one or more surface acoustic wave resonators configured to filter a radio frequency signal associated with the antenna, each surface acoustic wave resonator including an interdigital transducer having a pair of interdigital transducer electrodes, each electrode including a bus bar and fingers extending from the bus bar to an edge portion, a gap region defined between the edge portion of the fingers of one of the electrodes and the bus bar of the other of the electrodes, and a mass loading strip overlapping the fingers of the electrodes and having a width that overlaps the edge portions of the fingers and extends into the gap region by up to 20% of a width of the gap region to thereby suppress a transverse mode of the interdigital transducer.
Dependencies are inferred from the claim text.