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US 11,705,348 B2Granted
Laser light source and a laser crystallization apparatus including the same
AssigneeSamsung Display Co., Ltd.
InventorsKyong Sik Choi, Dong Hoon Shin, Hoon Chul Ryoo, Kyeong Mok Kim, Jae-Woong Moon, Kyong Ho Park, Ki Hwan Seok, Myoung Seok Son, Hong Ro Lee
Life of this patent
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Abstract
A laser light source is provided including an airtight container. A first resonance mirror and a second resonance mirror are disposed outside the airtight container. The first resonance mirror includes a lens unit and a reflection coating layer. The lens unit includes a first surface and a second surface, and the first surface is inclined with respect to the second surface.
Claims15
A laser light source, comprising:
- an airtight container;
- and
- a first resonance mirror and a second resonance mirror outside the airtight container,
- wherein the first resonance mirror includes a lens unit and a reflection coating layer, the lens unit includes a first surface and a second surface, the first surface is inclined with respect to the second surface, and the first surface and the second surface are flat surfaces,
- the first surface is disposed between the airtight container and the second surface,
- the second resonance mirror includes a third surface and a fourth surface, and
- the fourth surface is inclined with respect to the third surface.
4 more elements
A laser light source, comprising:
- an airtight container;
- and
- a first resonance mirror and a second resonance mirror outside the airtight container,
- wherein the first resonance mirror includes a lens unit and a reflection coating layer, the lens unit includes a first surface and a second surface, and the first surface is inclined with respect to the second surface,
- wherein the second resonance mirror includes a third surface and a fourth surface, and wherein the fourth surface is inclined with respect to the third surface,
- wherein
- the first resonance mirror includes a first point corresponding to a part where the first resonance mirror is thickest from the second surface of lens unit of the first resonance mirror, a second point corresponding to a part where the first resonance mirror is thinnest from the second surface of the lens unit of the first resonance mirror, and a first axis passing through the first point and the second point, and
- wherein the second resonance mirror includes a third point corresponding to a part where the second resonance mirror is thickest from the third surface of the second resonance mirror, a fourth point corresponding to a part where the second resonance mirror is thinnest from the third surface of the second resonance mirror, and a second axis passing through the third point and the fourth point, and
- wherein an angle between the first axis and the second axis is 80° to 100°.
6 more elements
A laser crystallization apparatus, comprising:
- a laser light source for generating laser light;
- and
- a stage mounted with a substrate,
- wherein the laser light source comprises an airtight container;
- a first resonance mirror outside the airtight container;
- and
- a second resonance mirror outside the airtight container,
- wherein the first resonance mirror includes a lens unit and a reflection coating layer,
- wherein the lens unit includes a first surface and a second surface facing each other,
- wherein the first surface is inclined with respect to the second surface, and
- the first surface and the second surface are flat surfaces, wherein
- the second resonance mirror includes a third surface d a fourth surface facing each other, and
- wherein the fourth surface is inclined with respect to the third surface.
10 more elements
A laser crystallization apparatus, comprising:
- a laser light source for generating laser light;
- and
- a stage mounted with a substrate,
- wherein the laser light source comprises an airtight container;
- a first resonance mirror outside the airtight container;
- and
- a second resonance mirror outside the airtight container,
- wherein the first resonance mirror includes a lens unit and a reflection coating layer,
- wherein the lens unit includes a first surface and a second surface facing each other,
- wherein the first surface is inclined with respect to the second surface,
- wherein the second resonance mirror includes a third surface and a fourth surface facing each other, and
- wherein the fourth surface is inclined with respect to the third surface,
- wherein
- the first resonance mirror includes a first point corresponding to a part where the first resonance mirror is thickest from the second surface of the lens unit of the first resonance mirror, a second point corresponding to a part where the first resonance mirror is thinnest from the second surface of the lens unit first resonance mirror, and a first axis passing through the first point and the second point, and
- wherein the second resonance mirror includes a third point corresponding to a part where the second resonance mirror is thickest from the third surface of the second resonance mirror, a fourth point corresponding to a part where the second resonance mirror is thinnest from the third surface of the second resonance mirror, and a second axis passing through the third point and the fourth point, and
- an angle between the first axis and the second axis is 80° to 100°.
13 more elements
A laser light source, comprising:
- a container;
- and
- a first resonance mirror;
- and
- a second resonance mirror outside the container facing the first resonance mirror,
- wherein a first surface and a second surface of the first resonance mirror facing each other are not parallel,
- wherein a first surface and a second surface of the second resonance mirror facing each other are not parallel, and
- the first surface and the second surface of the first resonance mirror are flat surfaces.
5 more elements
Dependencies are inferred from the claim text.