US 11,705,298 B2 · Flexible MEMS device having hinged sections

Abstract

A method of forming a microelectromechanical device is disclosed wherein a beam of the microelectromechanical device may deviate from a resting to an engaged or disengaged position through electrical biasing. The microelectromechanical device comprises a beam disposed above a first RF conductor and a second RF conductor. The microelectromechanical device further comprises at least a center stack, a first RF stack, a second RF stack, a first stack formed on a first base layer, and a second stack formed on a second base layer, each stack disposed between the beam and the first and second RF conductors. The beam is configured to deflect downward to first contact the first stack formed on the first base layer and the second stack formed on the second base layer simultaneously or the center stack, before contacting the first RF stack and the second RF stack simultaneously.

Claims14

Dependent claims

A microelectromechanical device, comprising:

a backplane comprising at least two RF conductors;
a plurality of bottom electrodes disposed on the backplane;
a top electrode disposed above and spaced from the backplane;
a beam disposed between the backplane and the top electrode, the beam moveable between the at least two RF conductors and the top electrode, wherein the beam comprises one or more hinge sections and at least two stiff waffle sections, wherein a hinge section of the one or more hinge sections is disposed between adjacent waffle sections of the at least two stiff waffle sections;
at least two RF stacks disposed above the at least two RF conductors;
and
a center stack disposed between the at least two RF stacks, wherein the one or more hinge sections comprise a first hinge section configured to contact the center stack prior to the beam contacting the at least two RF stacks.

4 more elements

A method of forming a microelectromechanical device, comprising:

forming a plurality of bottom electrodes on a backplane comprising at least two RF conductors;
depositing a bottom dielectric layer over the backplane and plurality of bottom electrodes;
etching one or more portions of the bottom dielectric layer;
depositing at least two RF stacks in at least two of the one or more etched portions, wherein the at least two RF stacks are disposed above the at least two RF conductors;
depositing a center stack in one of the one or more etched portions, wherein the center stack is disposed between the at least two RF stacks;
depositing a bottom beam layer above the bottom dielectric layer, the at least two RF stacks, and the center stack, wherein the bottom beam layer is spaced from the bottom dielectric layer, the at least two RF stacks, and the center stack, and wherein the bottom beam layer comprises one or more hinge sections and at least two stiff waffle section, such that a hinge section of the one or more hinge sections is disposed between two adjacent waffle sections of the at least two stiff waffle sections;
depositing a spun layer on the bottom beam layer;
etching one or more vias in the spun layer to form one or more hinge sections;
depositing a top beam layer on the spun layer and within the one or more vias, wherein the bottom beam layer and the top beam layer form a beam;
depositing a partial cavity layer above the beam, wherein a portion of the partial cavity layer forms a top electrode;
removing the spun layer;
and
depositing a seal layer above the beam and the partial cavity layer to enclose the beam in a cavity.

10 more elements

Dependencies are inferred from the claim text.

Flexible MEMS device having hinged sections

Life of this patent

Flexible MEMS device having hinged sections

Life of this patent

Abstract

Claims14