Photosensitive composition for EUV light, pattern forming method, and method for manufacturing electronic device

A photosensitive composition for EUV light, comprising:

• a resin that has an increased polarity by action of an acid, thereby having an increased solubility in an alkali developer and a decreased solubility in an organic solvent;
• and a photoacid generator, or
• a resin that has a repeating unit having a photoacid generating group, and has an increased polarity by action of an acid, thereby having an increased solubility in an alkali developer and a decreased solubility in an organic solvent, and
• wherein the photosensitive composition satisfies Requirement 1 to Requirement 3 and the resin has a repeating unit having a structure in which a polar group is protected with a leaving group that leaves by action of an acid,
• the resin has a group selected from a group consisting of Formula (Y1), Formula (Y2), Formula (Y4), and Formula (Y3-1) as the leaving group or has a repeating unit represented by Formula (A) as the repeating unit having a structure in which a polar group is protected with a leaving group that leaves by action of an acid;
• —C(Rx1)(Rx2)(Rx3) Formula (Y1)
• —C(═O)OC(Rx1)(Rx2)(Rx3) Formula (Y2)
• —C(Rn)(H)(Ar) Formula (Y4)
• in the Formula (Y1), Formula (Y2), and Formula (Y4), Rx1 to Rx3 each independently represent an alkyl group or a cycloalkyl group and two of Rx1 to Rx3 optionally be bonded to each other to form a monocycle or a polycycle;
• Ar represents an aromatic ring group, Rn represents an alkyl group, a cycloalkyl group, or an aryl group, and Rn and Ar optionally be bonded to each other to form a non-aromatic ring;
• in the Formula (Y3-1), L1 and L2 each independently represent a hydrogen atom, an alkyl group, a cycloalkyl group, an aryl group, or a group formed by combination thereof, M represents a single bond or a divalent linking group, and Q represents an alkyl group which include a heteroatom, a cycloalkyl group which include a heteroatom, an aryl group which optionally include a heteroatom, an amino group, an ammonium group, a mercapto group, a cyano group, an aldehyde group, or a group formed by combination thereof;
• in Formula (A), L1 represents a divalent linking group which optionally have a fluorine atom or an iodine atom, R1 represents a hydrogen atom, a fluorine atom, an iodine atom, an alkyl group which optionally have a fluorine atom or an iodine atom, or an aryl group which optionally have a fluorine atom or an iodine atom, R2 represents a group represented by Formula (Z1), Formula (Z2), Formula (Z3), or Formula (Z4), and at least one of L1, R1, and R2 has a fluorine atom or an iodine atom;
• —C(Rx11)(Rx12)(Rx13) Formula (Z1)
• —C(═O)OC(Rx11)(Rx12)(Rx13) Formula (Z2)
• —C(R136)(R137)(OR138) Formula (Z3)
• —C(Rn1)(H)(Ar1) Formula (Z4)
• Rx11 to Rx13 each independently represent an alkyl group which optionally have a fluorine atom or an iodine atom, or a cycloalkyl group which optionally have a fluorine atom or an iodine atom;
• R136 and R137 each independently represent a hydrogen atom or a monovalent organic group which optionally have a fluorine atom or an iodine atom, R138 represents an alkyl group which have a heteroatom selected from a group consisting of a fluorine atom, an iodine atom, and an oxygen atom;
• a cycloalkyl group which have a heteroatom selected from a group consisting of a fluorine atom, an iodine atom, and an oxygen atom;
• an aryl group which optionally have a heteroatom selected from the group consisting of a fluorine atom, an iodine atom, and an oxygen atom;
• an aralkyl group which optionally have a heteroatom selected from the group consisting of a fluorine atom, an iodine atom, and an oxygen atom;
• or a group formed by combination thereof, and R137 and R138 optionally be bonded to each other to form a ring;
• and
• Ar1 represents an aromatic ring group which optionally have a fluorine atom or an iodine atom, Rn1 represents an alkyl group which optionally have a fluorine atom or an iodine atom, a cycloalkyl group which optionally have a fluorine atom or an iodine atom, or an aryl group which optionally have a fluorine atom or an iodine atom, and Rn1 and Ar1 optionally be bonded to each other to form a non-aromatic ring,
• Requirement 1:
• an A value determined by Formula (1) is 0.14 or more,
• A=([H]×0.04+[C]×1.0+[N]×2.1+[O]×3.6+[F]×5.6+[S]×1.5+[I]×39.5)/([H]×1+[C]×12+[N]×14+[O]×16+[F]×19+[S]×32+[I]×127) Formula (1)
• in the formula, [H] represents a molar ratio of hydrogen atoms derived from a total solid content with respect to all atoms of the total solid content in the photosensitive composition for EUV light, [C] represents a molar ratio of carbon atoms derived from the total solid content with respect to all the atoms of the total solid content in the photosensitive composition for EUV light, [N] represents a molar ratio of nitrogen atoms derived from the total solid content with respect to all the atoms of the total solid content in the photosensitive composition for EUV light, [O] represents a molar ratio of oxygen atoms derived from the total solid content with respect to all the atoms of the total solid content in the photosensitive composition for EUV light, [F] represents a molar ratio of fluorine atoms derived from the total solid content with respect to all the atoms of the total solid content in the photosensitive composition for EUV light, [S] represents a molar ratio of sulfur atoms derived from the total solid content with respect to all the atoms of the total solid content in the photosensitive composition for EUV light, and [I] represents a molar ratio of iodine atoms derived from the total solid content with respect to all the atoms of the total solid content in the photosensitive composition for EUV light,
• Requirement 2:
• a concentration of a solid content in the photosensitive composition for EUV light is 5.0% by mass or less,
• Requirement 3:
• a content of the photoacid generator is 5% to 50% by mass with respect to the total solid content in the photosensitive composition for EUV light.